The INTERFACE TO ANSYS makes it possible to create precise finite-element simulations for the final design created with the MODELBUILDER. All geometric data is automatically transferred and transformed into a 3D ANSYS model. Corner fillets, underetchings of the mask and etched slopes on the side walls are also taken into account. Mesh-generation settings are predefined but can also be changed using a few parameters.

Traditional finite-element model generation for complicated MEMS sensors and actuators is time consuming, requires a lot of knowledge and is prone to errors. The ANSYS interface of the MODELBUILDERS combines MEMS models from concept development to the final finite-element-based design evaluation for a consistent and efficient design process.

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1. Program configuration

The number of functional elements is limited in the trial version. This does not affect functionality.

2. Installation


For the installation, we require information on your computer configuration.

3. Any questions?