The INTERFACE TO ANSYS makes it possible to create precise finite-element simulations for the final design created with the MODELBUILDER. All geometric data is automatically transferred and transformed into a 3D ANSYS model. Corner fillets, underetchings of the mask and etched slopes on the side walls are also taken into account. Mesh-generation settings are predefined but can also be changed using a few parameters.

Traditional finite-element model generation for complicated MEMS sensors and actuators is time consuming, requires a lot of knowledge and is prone to errors. The ANSYS interface of the MODELBUILDERS combines MEMS models from concept development to the final finite-element-based design evaluation for a consistent and efficient design process.