The TUTORIAL ON MEMS DESIGN includes extensive teaching and training material for training in microsystems technology. The tutorial is aimed at teachers and students at universities and colleges as well as at engineers in institutes and companies that work with the computer-aided design of electromechanical systems. The tutorial presents and explains the theoretical foundations, numerical algorithms and physical effects for the design of micromechanical sensors and actuators. Numerous examples and models explain the use of the i-ROM MODELBUILDERS for the design of microsystems technology.
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